Development of RF-MEMS Switch with Glass Package

Fumikazu Takayanagi; Hirokazu Sanpei; Masazumi Yasuoka; Jun Mizuno; Yasuhiro Maeda; Masayoshi Esashi

doi:https://doi.org/10.7567/SSDM.2002.P12-3

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[P12-3] Development of RF-MEMS Switch with Glass Package

Fumikazu Takayanagi, Hirokazu Sanpei, Masazumi Yasuoka, Jun Mizuno, Yasuhiro Maeda, Masayoshi Esashi (1.Advantest Laboratories LTD., 2.Faculty of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2002.P12-3

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