Development of RF-MEMS Switch with Glass Package

Fumikazu Takayanagi; Hirokazu Sanpei; Masazumi Yasuoka; Jun Mizuno; Yasuhiro Maeda; Masayoshi Esashi

doi:https://doi.org/10.7567/SSDM.2002.P12-3

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[P12-3] Development of RF-MEMS Switch with Glass Package

Fumikazu Takayanagi、Hirokazu Sanpei、Masazumi Yasuoka、Jun Mizuno、Yasuhiro Maeda、Masayoshi Esashi (1.Advantest Laboratories LTD.、2.Faculty of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2002.P12-3

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