[P13-1] Chemical Resistivity and Micro-fabrication of Organic Monolayer Directly Attached to Silicon

Yuki Kadoya、Nagahiro Saito、Kazuyuki Hayashi、Hiroyuki Sugimura、Osamu Takai (1.Nagoya University, Graduate School of Engineering)

https://doi.org/10.7567/SSDM.2002.P13-1