[P13-1] Chemical Resistivity and Micro-fabrication of Organic Monolayer Directly Attached to Silicon
Yuki Kadoya, Nagahiro Saito, Kazuyuki Hayashi, Hiroyuki Sugimura, Osamu Takai
(1.Nagoya University, Graduate School of Engineering)
https://doi.org/10.7567/SSDM.2002.P13-1