[P13-2] Study of Effects of Adsorbed Water and Self-Assembled Monolayers on Substrate Silicon by Scanning Probe Microscopy

Y. Ishida, K. Hayashi, H. Sugimura, O. Takai, N. Nakagiri (1.Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University, 2.Core Technology Center, Nikon Co.)

https://doi.org/10.7567/SSDM.2002.P13-2