Study of Effects of Adsorbed Water and Self-Assembled Monolayers on Substrate Silicon by Scanning Probe Microscopy

Y. Ishida; K. Hayashi; H. Sugimura; O. Takai; N. Nakagiri

doi:https://doi.org/10.7567/SSDM.2002.P13-2

[P13-2] Study of Effects of Adsorbed Water and Self-Assembled Monolayers on Substrate Silicon by Scanning Probe Microscopy

Y. Ishida、K. Hayashi、H. Sugimura、O. Takai、N. Nakagiri (1.Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University、2.Core Technology Center, Nikon Co.)

https://doi.org/10.7567/SSDM.2002.P13-2

2002 International Conference on Solid State Devices and Materials

[P13-2] Study of Effects of Adsorbed Water and Self-Assembled Monolayers on Substrate Silicon by Scanning Probe Microscopy