Fine Processing in Heat-Resistant Polymer by Electron-Beam Lithography and Thermal Development

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

Masahiro Tomiki, Okihiro Sugihara, Hisashi Fujimura, Naomichi Okamoto (1.Shizuoka University, Graduate School of Electronic Science and Technology)