[P13-5] Fine Processing in Heat-Resistant Polymer by Electron-Beam Lithography and Thermal Development

Masahiro Tomiki、Okihiro Sugihara、Hisashi Fujimura、Naomichi Okamoto (1.Shizuoka University, Graduate School of Electronic Science and Technology)

https://doi.org/10.7567/SSDM.2002.P13-5