The Japan Society of Applied Physics

[P13-6] Processing of polymer optical circuit by micromachining Silicon mold

Kenji Isogai, Okihiro Sugihara, Hisashi Fujimura, Naomichi Okamoto (1.Shizuoka University, Graduate School of Electronic Science and Technology)

https://doi.org/10.7567/SSDM.2002.P13-6