[P14-1] Micromachining of Silicon Carbide by Silicon Lost Molding, Chemical Vapor Deposition And Reaction-Sintering

Toru Itoh, Shuji Tanaka, Jing-Feng Li, Ryuzo Watanabe, Masayoshi Esashi (1.Department of Mechatronics and Precision Engineering, Tohoku University, 2.Department of Materials Processing, Tohoku University, 3.New Industry Creation Hatchery Center, Tohoku University)

https://doi.org/10.7567/SSDM.2002.P14-1