Atomic-layer deposition of ZrO2 with a Si nitride barrier layer

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

Hiroyuki Ishii, Toshirou Kidera, Anri Nakajima, Shin Yokoyama (1.Research Center for Nanodevices and Systems, Hiroshima University)