[P3-17] Atomic-layer deposition of ZrO2 with a Si nitride barrier layer

Hiroyuki Ishii、Toshirou Kidera、Anri Nakajima、Shin Yokoyama (1.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2002.P3-17