[P3-19] Prevention of degradation in poly Si1-xGex/high K structure by controlling Ge content in poly Si1-xGex films

S. K. Kang, J. H. Yoo, B. G. Min, S. W. Nam, D.-H. Ko, H. B. Kang, C. W. Yang, M.-H. Cho (1.Department of Ceramic Engineering, Yonsei University, 2.School of Metallurgy and Material Engineering, Sung Kyun Kwan University, 3.School of Material Science and Engineering, Stanford University)

https://doi.org/10.7567/SSDM.2002.P3-19