[P3-19] Prevention of degradation in poly Si1-xGex/high K structure by controlling Ge content in poly Si1-xGex films

S. K. Kang、J. H. Yoo、B. G. Min、S. W. Nam、D.-H. Ko、H. B. Kang、C. W. Yang、M.-H. Cho (1.Department of Ceramic Engineering, Yonsei University、2.School of Metallurgy and Material Engineering, Sung Kyun Kwan University、3.School of Material Science and Engineering, Stanford University)

https://doi.org/10.7567/SSDM.2002.P3-19