Role of Hydrogen in Negative-Bias Temperature Instability

Jiro Ushio; Kikuo Watanabe; Keiko Kushida-Abdelghafar; Takuya Maruizumi

doi:https://doi.org/10.7567/SSDM.2002.P3-6

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[P3-6] Role of Hydrogen in Negative-Bias Temperature Instability

Jiro Ushio、Kikuo Watanabe、Keiko Kushida-Abdelghafar、Takuya Maruizumi (1.Advanced Research Laboratory, Hitachi, Ltd.、2.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.2002.P3-6

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