Role of Hydrogen in Negative-Bias Temperature Instability

Jiro Ushio; Kikuo Watanabe; Keiko Kushida-Abdelghafar; Takuya Maruizumi

doi:https://doi.org/10.7567/SSDM.2002.P3-6

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[P3-6] Role of Hydrogen in Negative-Bias Temperature Instability

Jiro Ushio, Kikuo Watanabe, Keiko Kushida-Abdelghafar, Takuya Maruizumi (1.Advanced Research Laboratory, Hitachi, Ltd., 2.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.2002.P3-6

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