The Japan Society of Applied Physics

[P3-9] Formation of Ni Silicide Using Flash Lamp Technology

I. Nishimura, T. Karasawa, T. Owada, M. Yasuhira, T. Arikado (1.Research Dept1, Semiconductor Leading Edge Technologies Inc., 2.Lamp Technology and Engineering Division, Ushio Inc.)

https://doi.org/10.7567/SSDM.2002.P3-9