The Japan Society of Applied Physics

[P4-10] Ordered 1 x 1 SiH2 Monolayer Adsorption on Si(001) from Cracked Si2H6 and Its Application to ALE Growth Operation

Naoyuki Hosoya, Kazushi Miki, Yoshiyuki Suda (1.Faculty of Technology, Tokyo University of Agriculture and Technology, 2.Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology)