The Japan Society of Applied Physics

2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[P4-11] Analysis of porous silicon formation process using infrared absorption spectroscopy and Monte Carlo simulation

Yasuo Kimura, Hisao Ishii, Michio Niwano (1.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.2002.P4-11