Application of Thin Nano-Crystalline VN Barrier in Cu/VN/SiO2/Si Systems

Mayumi B. Takeyama; Kazumi Satoh; Takaomi Itoi; Masakazu Sakagami; Atsushi Noya

doi:https://doi.org/10.7567/SSDM.2002.P4-13

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[P4-13] Application of Thin Nano-Crystalline VN Barrier in Cu/VN/SiO2/Si Systems

Mayumi B. Takeyama, Kazumi Satoh, Takaomi Itoi, Masakazu Sakagami, Atsushi Noya (1.Kitami Institute of Technology, Dept. Electrical and Electronic Engineering)

https://doi.org/10.7567/SSDM.2002.P4-13

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