Analysis of Pore Structures in Ultra Low-k Dielectrics

N. Hata; C. Negoro; K. Yamada; H. S. Zhou; Y. Oku; T. Kikkawa

doi:https://doi.org/10.7567/SSDM.2002.P4-14

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[P4-14] Analysis of Pore Structures in Ultra Low-k Dielectrics

N. Hata, C. Negoro, K. Yamada, H. S. Zhou, Y. Oku, T. Kikkawa (1.MIRAI Project, ASRC, AIST, 2.ASRC, AIST, 3.MIRAI Project, ASET, 4.Energy Electronics Institute, AIST, 5.RCNS, Hiroshima Univ.)

https://doi.org/10.7567/SSDM.2002.P4-14

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