[P4-4] Structural and Electrical Properties of HfO2-TiO2 Composite Films Formed by Pulsed Laser Deposition

Kazutaka Honda、Satoru Goto、Mitsuo Sakashita、Hiroya Ikeda、Akira Sakai、Shigeaki Zaima、Yukio Yasuda (1.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University、2.Center for Cooperative Research in Advanced Science and Technology, Nagoya University)

https://doi.org/10.7567/SSDM.2002.P4-4