[P4-9] Scaning Tunneling Microscopy of Initial Nitridation Processes on Oxidized Si(100) Surface with Radical Nitrogen

Ryoya Takahashi, Yasushi Kobayashi, Hiroya Ikeda, Mitsuo Sakashita Osamu Nakatsuka, Akira Sakai, Shigeaki Zaima, Yukio Yasuda (1.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, 2.Center for Integrated Research in Science and Engineering, Nagoya University, 3.Center for Cooperative Research in Advanced Science and Technology, Nagoya University)

https://doi.org/10.7567/SSDM.2002.P4-9