Epitaxial growth of ZnO films by low-pressure MOVPE

B. P. Zhang; L. H. Manh; K. Wakatsuki; N. Usami; Y. Segawa

doi:https://doi.org/10.7567/SSDM.2002.P5-14

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[P5-14] Epitaxial growth of ZnO films by low-pressure MOVPE

B. P. Zhang, L. H. Manh, K. Wakatsuki, N. Usami, Y. Segawa (1.Photodynamics Research Center, The Institute of Physical and Chemical Research, 2.Institute for Materials Research, Tohoku University)

https://doi.org/10.7567/SSDM.2002.P5-14

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