The Japan Society of Applied Physics

[P5-14] Epitaxial growth of ZnO films by low-pressure MOVPE

B. P. Zhang、L. H. Manh、K. Wakatsuki、N. Usami、Y. Segawa (1.Photodynamics Research Center, The Institute of Physical and Chemical Research、2.Institute for Materials Research, Tohoku University)

https://doi.org/10.7567/SSDM.2002.P5-14