Epitaxial growth of ZnO films by low-pressure MOVPE

B. P. Zhang; L. H. Manh; K. Wakatsuki; N. Usami; Y. Segawa

doi:https://doi.org/10.7567/SSDM.2002.P5-14

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[P5-14] Epitaxial growth of ZnO films by low-pressure MOVPE

B. P. Zhang、L. H. Manh、K. Wakatsuki、N. Usami、Y. Segawa (1.Photodynamics Research Center, The Institute of Physical and Chemical Research、2.Institute for Materials Research, Tohoku University)

https://doi.org/10.7567/SSDM.2002.P5-14

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