[P7-5] Plasma-Radiation-Induced Interface-States in MNOS of CCD Image Sensors and their Reduction Using Pulse-Time-Modulated Plasma

Mitsuru Okigawa、Yasushi Ishikawa、Seiji Samukawa (1.Institute of Fluid Science, Tohoku University、2.Sanyo Electric Co., Ltd., Semiconductor Company System LSI Division CCD Development)

https://doi.org/10.7567/SSDM.2002.P7-5