Fabrication of Carbon Whisker, Pyramid and Steeple Using a Novel Plasma CVD and their Application to Field Electron Emitter

Masaru Hori; Mineo Hiramatsu; Toshio Goto

doi:https://doi.org/10.7567/SSDM.2002.P7-6

[P7-6] Fabrication of Carbon Whisker, Pyramid and Steeple Using a Novel Plasma CVD and their Application to Field Electron Emitter

Masaru Hori、Mineo Hiramatsu、Toshio Goto (1.Department of Quantum Engineering, Nagoya University、2.Department of Electrical and Electronic Engineering, Meijo University)

https://doi.org/10.7567/SSDM.2002.P7-6

2002 International Conference on Solid State Devices and Materials

[P7-6] Fabrication of Carbon Whisker, Pyramid and Steeple Using a Novel Plasma CVD and their Application to Field Electron Emitter