[P7-6] Fabrication of Carbon Whisker, Pyramid and Steeple Using a Novel Plasma CVD and their Application to Field Electron Emitter

Masaru Hori, Mineo Hiramatsu, Toshio Goto (1.Department of Quantum Engineering, Nagoya University, 2.Department of Electrical and Electronic Engineering, Meijo University)

https://doi.org/10.7567/SSDM.2002.P7-6