0.13μm Low-K/Cu Logic CMOS Based Technology for High Performance Analog Devices

J. C. Guo; W.Y. Lien; T.L. Tsai; S.M. Chen; C.M. Wu; Y.C. Sun; Ping Yang

doi:https://doi.org/10.7567/SSDM.2003.A-8-4

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[A-8-4] 0.13μm Low-K/Cu Logic CMOS Based Technology for High Performance Analog Devices

J. C. Guo, W.Y. Lien, T.L. Tsai, S.M. Chen, C.M. Wu, Y.C. Sun, Ping Yang (1.Deptartment of Electronics Engineering, National Chiao Tung University, 2.Research Development Center, Taiwan Semiconductor Manufacturing Corp)

https://doi.org/10.7567/SSDM.2003.A-8-4

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