Two-Mode Behavior in Time and Temperature Dependence of Imprint-Induced Charge Loss in Integrated SrBi2(Ta,Nb)2O9 Capacitors

Atsushi Noma; Takumi Mikawa; Yoshihisa Nagano; Yuji Judai; Eiji Fujii

doi:https://doi.org/10.7567/SSDM.2003.B-2-4

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[B-2-4] Two-Mode Behavior in Time and Temperature Dependence of Imprint-Induced Charge Loss in Integrated SrBi2(Ta,Nb)2O9 Capacitors

Atsushi Noma、Takumi Mikawa、Yoshihisa Nagano、Yuji Judai、Eiji Fujii (1.ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.2003.B-2-4

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