The Japan Society of Applied Physics

[B-2-4] Two-Mode Behavior in Time and Temperature Dependence of Imprint-Induced Charge Loss in Integrated SrBi2(Ta,Nb)2O9 Capacitors

Atsushi Noma、Takumi Mikawa、Yoshihisa Nagano、Yuji Judai、Eiji Fujii (1.ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.2003.B-2-4