[C-5-4] In-situ Measurement of Friction Force during Cu Chemical Mechanical Polishing

Hisanori Matsuo、Akira Ishikawa、Takamaro Kikkawa (1.MIRAI Project, ASET、2.MIRAI Project, ASRC, AIST、3.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.C-5-4