[C-5-4] In-situ Measurement of Friction Force during Cu Chemical Mechanical Polishing

Hisanori Matsuo, Akira Ishikawa, Takamaro Kikkawa (1.MIRAI Project, ASET, 2.MIRAI Project, ASRC, AIST, 3.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.C-5-4