[C-6-2] Control of Pore Size and Porosity in Periodic Porous Silica Low-k Films

N. Hata、C. Negoro、K. Yamada、T. Kikkawa (1.MIRAI Project, Advanced Semiconductor Research Center, AIST Tsukuba-West、2.Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology、3.MIRAI Project, Association of Super-Advanced Electronics Technology, AIST Tsukuba-West、4.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.C-6-2