[C-6-2] Control of Pore Size and Porosity in Periodic Porous Silica Low-k Films

N. Hata, C. Negoro, K. Yamada, T. Kikkawa (1.MIRAI Project, Advanced Semiconductor Research Center, AIST Tsukuba-West, 2.Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology, 3.MIRAI Project, Association of Super-Advanced Electronics Technology, AIST Tsukuba-West, 4.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.C-6-2