[C-6-3] Off-time Dependence of Pulsed DC Electromigration MTF of Cu Multilevel Interconnection

K. Oshima、T. Ishida、S. Miyazaki、T. Takahagi、S. Shingubara (1.Hiroshima University, Graduate School of ADSM)

https://doi.org/10.7567/SSDM.2003.C-6-3