[D-1-3] Neighboring effect in nitrogen-enhanced negative bias temperature instability

Shyue Seng Tan, Tu Pei Chen, Jia Mei Soon, Kian Ping Loh, C. H. Ang, W. Y. Teo, Lap Chan (1.School of Electrical & Electronic Engineering, Nanyang Technological University, 2.Department of Chemistry, National University of Singapore, 3.Technology Development Department, Chartered Semiconductor Manufacturing Limited)

https://doi.org/10.7567/SSDM.2003.D-1-3