[D-1-3] Neighboring effect in nitrogen-enhanced negative bias temperature instability

Shyue Seng Tan、Tu Pei Chen、Jia Mei Soon、Kian Ping Loh、C. H. Ang、W. Y. Teo、Lap Chan (1.School of Electrical & Electronic Engineering, Nanyang Technological University、2.Department of Chemistry, National University of Singapore、3.Technology Development Department, Chartered Semiconductor Manufacturing Limited)

https://doi.org/10.7567/SSDM.2003.D-1-3