Accurate measurement of mechanical properties of nanoporous silica ultra-low-k films

Yutaka Seino; Rie Ichikawa; Hirofumi Tanaka; Takamaro Kikkawa

doi:https://doi.org/10.7567/SSDM.2003.D-2-2

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[D-2-2] Accurate measurement of mechanical properties of nanoporous silica ultra-low-k films

Yutaka Seino, Rie Ichikawa, Hirofumi Tanaka, Takamaro Kikkawa (1.MIRAI Project, ASRC, AIST, 2.ASRC, AIST, 3.MIRAI Project, ASET, 4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.D-2-2

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