Accurate measurement of mechanical properties of nanoporous silica ultra-low-k films

Yutaka Seino; Rie Ichikawa; Hirofumi Tanaka; Takamaro Kikkawa

doi:https://doi.org/10.7567/SSDM.2003.D-2-2

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[D-2-2] Accurate measurement of mechanical properties of nanoporous silica ultra-low-k films

Yutaka Seino、Rie Ichikawa、Hirofumi Tanaka、Takamaro Kikkawa (1.MIRAI Project, ASRC, AIST、2.ASRC, AIST、3.MIRAI Project, ASET、4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.D-2-2

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