Mechanical Property and Skeletal Silicate Structure of Periodic Porous Silica Films

Syozo Takada; Nobuhiro Hata; Yutaka Seino; Kazuhiro Yamada; Yoshiaki Oku; Takamaro Kikkawa

doi:https://doi.org/10.7567/SSDM.2003.D-2-3

[D-2-3] Mechanical Property and Skeletal Silicate Structure of Periodic Porous Silica Films

Syozo Takada, Nobuhiro Hata, Yutaka Seino, Kazuhiro Yamada, Yoshiaki Oku, Takamaro Kikkawa (1.Advanced Semiconductor Research Center , AIST, 2.MIRAI Project-ASRC, AIST, 3.MIRAI Project-ASET, 4.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.D-2-3

2003 International Conference on Solid State Devices and Materials

[D-2-3] Mechanical Property and Skeletal Silicate Structure of Periodic Porous Silica Films