Mechanical Property and Skeletal Silicate Structure of Periodic Porous Silica Films

Syozo Takada; Nobuhiro Hata; Yutaka Seino; Kazuhiro Yamada; Yoshiaki Oku; Takamaro Kikkawa

doi:https://doi.org/10.7567/SSDM.2003.D-2-3

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[D-2-3] Mechanical Property and Skeletal Silicate Structure of Periodic Porous Silica Films

Syozo Takada、Nobuhiro Hata、Yutaka Seino、Kazuhiro Yamada、Yoshiaki Oku、Takamaro Kikkawa (1.Advanced Semiconductor Research Center , AIST、2.MIRAI Project-ASRC, AIST、3.MIRAI Project-ASET、4.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.D-2-3

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