[D-2-4] Determination of the Mechanical Properties of Thin Periodic Porous Silica Films by Laser-Generated Surface Acoustic Wave Technique

Xia Xiao, Nobuhiro Hata, Kazuhiro Yamada, Hirofumi Tanaka, Takamaro Kikkawa (1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), AIST, 2.MIRAI Project, ASET, 3.Research Center for Nanodevices and Systems (RCNS), Hiroshima University)

https://doi.org/10.7567/SSDM.2003.D-2-4