[D-2-4] Determination of the Mechanical Properties of Thin Periodic Porous Silica Films by Laser-Generated Surface Acoustic Wave Technique

Xia Xiao、Nobuhiro Hata、Kazuhiro Yamada、Hirofumi Tanaka、Takamaro Kikkawa (1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), AIST、2.MIRAI Project, ASET、3.Research Center for Nanodevices and Systems (RCNS), Hiroshima University)

https://doi.org/10.7567/SSDM.2003.D-2-4