[D-2-5] HRTEM and EELS Analyses of Interfacial Nanostructures in Ti/Si1-xGex/Si(100)

Jun Yamasaki、Nobuo Tanaka、Osamu Nakatsuka、Akira Sakai、S. Zaima、Y. Yasuda (1.Center for Integrated Research in Science and Engineering (CIRSE), Nagoya Univ.、2.Dept. of Crystalline Materials Science, Graduate School of Eng., Nagoya Univ.、3.Center for Cooperative Research in Advanced Science & Technology (CCRAST), Nagoya Univ.)

https://doi.org/10.7567/SSDM.2003.D-2-5