[D-6-2] Structural Characterization of Strained Silicon Substrates by X-Ray Diffraction and Reflectivity

M. Erdtmann、T. A. Langdo、C. J. Vineis、H. Badawi、M. T. Bulsara (1.AmberWave Systems Corp.)

https://doi.org/10.7567/SSDM.2003.D-6-2