[D-6-4] Enhanced Metal-Induced Lateral Crystallization in Amorphous Ge/Si Layered Structure by Precursor Modulation

Hiroshi Kanno、Atsushi Kenjo、Taizoh Sadoh、Masanobu Miyao (1.Department of Electronics, Kyushu University)

https://doi.org/10.7567/SSDM.2003.D-6-4