[D-7-0L] Simultaneous formation of multi-wall carbon nanotubes and their low-resistance ohmic contacts for future ULSI via interconnects

Mizuhisa Nihei, Akio Kawabata, Masahiro Horibe, Yuji Awano (1.Fujitsu Ltd.)

https://doi.org/10.7567/SSDM.2003.D-7-0L