Ultra -low Energy Nitrogen -ion Irradiation for Improvement of Carbon Nanotube Channel Single Electron Transistor

T. Kamimura; K. Yamamoto; K. Matsumoto

doi:https://doi.org/10.7567/SSDM.2003.D-7-3

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[D-7-3] Ultra -low Energy Nitrogen -ion Irradiation for Improvement of Carbon Nanotube Channel Single Electron Transistor

T. Kamimura、K. Yamamoto、K. Matsumoto (1.National Institute of Advanced Industrial Science and Technology、2.Univ. of Tsukuba、3.Osaka Univ.、4.CREST/JST)

https://doi.org/10.7567/SSDM.2003.D-7-3

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