Ultra -low Energy Nitrogen -ion Irradiation for Improvement of Carbon Nanotube Channel Single Electron Transistor

T. Kamimura; K. Yamamoto; K. Matsumoto

doi:https://doi.org/10.7567/SSDM.2003.D-7-3

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[D-7-3] Ultra -low Energy Nitrogen -ion Irradiation for Improvement of Carbon Nanotube Channel Single Electron Transistor

T. Kamimura, K. Yamamoto, K. Matsumoto (1.National Institute of Advanced Industrial Science and Technology, 2.Univ. of Tsukuba, 3.Osaka Univ., 4.CREST/JST)

https://doi.org/10.7567/SSDM.2003.D-7-3

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